Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Cited by
29 articles.
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1. Ozone;Ullmann's Encyclopedia of Industrial Chemistry;2022-12-16
2. Rapid and Uniform SiO2Film Growth on 4 inch Si Wafer Using 100%-O3Gas;Japanese Journal of Applied Physics;2005-01-11
3. Ozone;Ullmann's Encyclopedia of Industrial Chemistry;2000-06-15
4. Infrared and microwave spectroscopy of ozone: historical aspects;Uspekhi Fizicheskih Nauk;1994
5. Techniques for the growth of superconducting oxide thin films using pure ozone vapor;Review of Scientific Instruments;1989-12