High‐speed laser chemical vapor deposition of copper: A search for optimum conditions
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.342817
Reference10 articles.
1. A review of laser–microchemical processing
2. Laser Microchemistry and its Application to Electron-Device Fabrication
3. Laser chemical vapor deposition of copper
4. Photochemical generation and deposition of copper from a gas phase precursor
5. Growth rates and electrical conductivity of microscopic ohmic contacts fabricated by laser chemical vapor deposition of platinum
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