Spatial confinement and saturation of substitutional platinum by diffusion into ion‐beam damaged silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.360600
Reference14 articles.
1. Diffusion and lifetime engineering in silicon
2. Diffusion and Solubility of Platinum in Silicon
3. Spin Resonance of Pd and Pt in Silicon
4. Structural bonding of deep level defects and the nature of amphoteric centres in silicon
5. Electrical properties of platinum in silicon
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