1. Institute of Ion-plasma and Laser Technologies of the Academy of Sciences 1 , Tashkent, Uzbekistan
2. B+W Department, Offenburg University of Applied Sciences 2 , 77652 Offenburg, Germany
3. LSI, Ecole Polytechnique, CEA/DRF/IRAMIS, CNRS, Institut Polytechnique de Paris 3 , F-91128 Palaiseau, France