Deeply sub-wavelength non-contact optical metrology of sub-wavelength objects-Reference-Cited by-同舟云学术

Deeply sub-wavelength non-contact optical metrology of sub-wavelength objects

Published:2021-06-01 Issue:6 Volume:6 Page:066107
ISSN:2378-0967
Container-title:APL Photonics
language:en
Short-container-title:APL Photonics

Author:

Rendón-Barraza Carolina¹^ORCID,Chan Eng Aik¹^ORCID,Yuan Guanghui¹^ORCID,Adamo Giorgio¹^ORCID,Pu Tanchao²^ORCID,Zheludev Nikolay I.¹²^ORCID

Affiliation:

1. Centre for Disruptive Photonic Technologies, The Photonics Institute, School of Physical and Mathematical Sciences, Nanyang Technological University, 637371, Singapore

2. Centre for Photonic Metamaterials and Optoelectronics Research Centre, University of Southampton, Southampton SO17 1BJ, United Kingdom

Funder

Ministry of Education - Singapore

Agency for Science, Technology and Research

Engineering and Physical Sciences Research Council

China Scholarship Council

the European Research Council

Publisher

AIP Publishing

Subject

Computer Networks and Communications,Atomic and Molecular Physics, and Optics

Link

https://aip.scitation.org/doi/pdf/10.1063/5.0048139

Reference14 articles.

1. Far-Field Optical Nanoscopy

2. Sub-diffraction-limit imaging by stochastic optical reconstruction microscopy (STORM)

3. Solving the inverse grating problem by white light interference Fourier scatterometry

4. Metrology of optically-unresolved features using interferometric surface profiling and RCWA modeling

5. Replacing libraries in scatterometry

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