A two‐dimensional model of laser ablation of frozen Cl2: A possible neutral beam source for etching applications-Reference-Cited by-同舟云学术

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A two‐dimensional model of laser ablation of frozen Cl2: A possible neutral beam source for etching applications

Published:1996-07-15 Issue:2 Volume:80 Page:1146-1155
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:

Author:

Ventzek Peter L. G.¹,Suzuki Motoyuki¹,Date H.¹,Sakai Y.¹,Tagashira H.¹,Kitamori K.¹

Affiliation:

1. Department of Electrical Engineering, Hokkaido University, Sapporo 060, Japan

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Reference31 articles.

1. A. Szabo and T. Engel, J. Vac. Sci. Technol. A 12, 648 (1994).JVTAD60734-2101

2. K. Suzuki, S. Hiraoka, and S. Nishimatsu, J. Appl. Phys. 64, 3697 (1988); JAPIAU0021-8979

3. K. Suzuki and Hiraoka, J. Appl. Phys. 77, 6624 (1995).JAPIAU0021-8979, J. Appl. Phys.

4. L. M. Cousins and S. R. Leone, Chem. Phys. Lett. 155, 162 (1989); CHPLBC0009-2614

5. S. R. Leone, F. X. Campos, and G. C. Weaver, in Proceedings of the Dry Process Symposium, 1994 p. 85

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1. Laser-Induced Material Ejection from Model Molecular Solids and Liquids: Mechanisms, Implications, and Applications;Chemical Reviews;2003-02-01

2. The importance of the plume ejection time for the fragmentation yields observed in the UV ablation of molecular van der Waals films. Ablation of chlorobenzene films at 248 nm;Chemical Physics Letters;1997-05

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