Author:
Hart R. R.,Anderson C. L.,Dunlap H. L.,Seliger R. L.,Wang V.
Subject
Physics and Astronomy (miscellaneous)
Cited by
28 articles.
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1. Iodine enhanced focused-ion-beam etching of silicon for photonic applications;Journal of Applied Physics;2007-11-15
2. Structural damage induced by Ga+ focused ion beam implantation in (001) Si;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1991-11
3. Damage formation and annealing of ion implantation in Si;Materials Science Reports;1991-04
4. On the optimization of ion microprobes;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1990-01
5. Focused Ion Beam Lithography Using Novolak-Based Resist;Japanese Journal of Applied Physics;1988-09-20