Characterization of extreme ultraviolet light-emitting plasmas from a laser-excited fluorine containing liquid polymer jet target-Reference-Cited by-同舟云学术

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Characterization of extreme ultraviolet light-emitting plasmas from a laser-excited fluorine containing liquid polymer jet target

Published:2004-06-15 Issue:12 Volume:95 Page:7619-7623
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Abel B.,Assmann J.,Faubel M.,Gäbel K.,Kranzusch S.,Lugovoj E.,Mann K.,Missalla T.,Peth Ch.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.1737051

Reference17 articles.

1. A molecular beam study of the evaporation of water from a liquid jet

2. Non-equilibrium molecular evaporation of carboxylic acid dimers

3. Scaling-up a liquid water jet laser plasma source to high average power for extreme-ultraviolet lithography

4. Xenon liquid-jet laser plasma source for EUV lithography

5. X-ray generation in cryogenic targets irradiated by 1 μm pulse laser

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Emission Spectra of Molecular Gases CHF3, CCl2F2, SF6 in the Range 3–20 nm under Pulsed Laser Excitation Using Various Gas Jets as Targets;Optics and Spectroscopy;2023-06

2. XUV laser-plasma source based on solid Ar filament;Review of Scientific Instruments;2007-10

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