Hafnia: Energetics of thin films and nanoparticles
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3435317
Reference39 articles.
1. Development of crystallinity and morphology in hafnium dioxide thin films grown by atomic layer epitaxy
2. Influence of substrate temperature on atomic layer growth and properties of HfO2 thin films
3. Deposition of optical thin films by pulsed laser assisted evaporation
4. First-Principles Investigation of Hydroxylated Monoclinic HfO2 Surfaces
5. Study of HfO2 films prepared by ion-assisted deposition using a gridless end-hall ion source
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