Estimation of electron temperature and density of the decay plasma in a laser-assisted discharge plasma extreme ultraviolet source by using a modified Stark broadening method-Reference-Cited by-同舟云学术

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Estimation of electron temperature and density of the decay plasma in a laser-assisted discharge plasma extreme ultraviolet source by using a modified Stark broadening method

Published:2011-12-15 Issue:12 Volume:110 Page:123302
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Zhu Qiushi,Muto Takahiro,Yamada Junzaburo,Kishi Nozomu,Watanabe Masato,Okino Akitoshi,Horioka Kazuhiko,Hotta Eiki

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.3672816

Reference32 articles.

1. EUV Sources for Lithography

2. Progress in the ASML EUV program

3. Integrating Philips' extreme UV source in the alpha-tools

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Micro-pinch formation and extreme ultraviolet emission of laser-induced discharge plasma*;Chinese Physics B;2021-09-01

2. Characteristics of laser induced discharge tin plasma and its extreme ultraviolet radiation;Frontiers of Optoelectronics;2020-04-14

3. Plasma dynamics in the initial stage of a laser-triggered discharge-plasma;Journal of Applied Physics;2018-12-07

4. Laser-Assisted Counter-Facing Plasma Focus Device as a Light Source for EUV Lithography;IEEE Transactions on Plasma Science;2017-05

5. Determination of Stark parameters by cross-calibration in a multi-element laser-induced plasma;Scientific Reports;2016-05-12

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