Moisture-absorption-induced permittivity deterioration and surface roughness enhancement of lanthanum oxide films on silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2174840
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1. High-κ gate dielectrics: Current status and materials properties considerations
2. High dielectric constant oxides
3. Infrared and electrical properties of amorphous sputtered (LaxAl1−x)2O3 films
4. MOCVD of High-Dielectric-Constant Lanthanum Oxide Thin Films
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