Dynamic imaging of 13.5 nm extreme ultraviolet emission from laser-produced Sn plasmas
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2139990
Reference9 articles.
1. Conversion efficiencies from laser‐produced plasmas in the extreme ultraviolet regime
2. Characterization of extreme ultraviolet emission from laser-produced spherical tin plasma generated with multiple laser beams
3. Target fabrication of low-density and nanoporous tin oxide as laser targets to generate extreme ultraviolet
4. High conversion efficiency mass-limited Sn-based laser plasma source for extreme ultraviolet lithography
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