Skeletal silica characterization in porous-silica low-dielectric-constant films by infrared spectroscopic ellipsometry
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1903108
Reference37 articles.
1. Theoretical Analysis of Elastic Modulus and Dielectric Constant for Low-kTwo-Dimensional Periodic Porous Silica Films
2. Dielectric property-microstructure relationship for nanoporous silica based thin films
3. Continuous formation of supported cubic and hexagonal mesoporous films by sol–gel dip-coating
4. Photoluminescent Silicon Clusters in Oriented Hexagonal Mesoporous Silica Film
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