The mechanical robustness of atomic-layer- and molecular-layer-deposited coatings on polymer substrates-Reference-Cited by-同舟云学术

The mechanical robustness of atomic-layer- and molecular-layer-deposited coatings on polymer substrates

Published:2009-05 Issue:9 Volume:105 Page:093527
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Miller David C.,Foster Ross R.,Zhang Yadong,Jen Shih-Hui,Bertrand Jacob A.,Lu Zhixing,Seghete Dragos,O’Patchen Jennifer L.,Yang Ronggui,Lee Yung-Cheng,George Steven M.,Dunn Martin L.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.3124642

Reference59 articles.

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3. Viscous flow reactor with quartz crystal microbalance for thin film growth by atomic layer deposition

4. Advanced High K Dielectrics for Nano Electronics - Science and Technologies

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