A study of electron energy distributions in an inductively coupled plasma by laser Thomson scattering
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.366915
Reference19 articles.
1. Thomson scattering measurements of electron temperature and density in an electron cyclotron resonance plasma
2. Measurement of non‐Maxwellian electron energy distributions in an inductively coupled plasma
3. Measurement of electron energy distribution in low-pressure RF discharges
4. Time-Modulated Electron Cyclotron Resonance Plasma Discharge for Controlling the Polymerization in SiO2Etching
5. Electron and ion distribution functions in RF and microwave plasmas
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