Hydrogen in semi‐insulating polycrystalline silicon films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.328302
Reference22 articles.
1. Characterization of Silicon Nitride Films
2. Chemically Bound Hydrogen in CVD Si3 N 4: Dependence on NH 3 / SiH4 Ratio and on Annealing
3. Analyses for stoichiometry and for Hydrogen and Oxygen in silicon nitride films
4. Hydrides and Hydroxyls in Thin Silicon Dioxide Films
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