Determination of the plane stress elastic constants of thin films from substrate curvature measurements: Applications to amorphous metals
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.354025
Reference25 articles.
1. Internal stress and internal friction in thin‐layer microelectronic materials
2. Vibrating membrane elastometer for reliable measurement of mechanical properties of metallic films
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