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3. Handbook of Thin Film Process Technology,edited by D. A. Glocker and S. I. Shah (Institute of Physics, Philadelphia, PA, 1995).
4. L. I. Maissel and R. Glang,Handbook of Thin Film Technology(McGraw-Hill, St. Louis, MO, 1970).
5. K. K. Schuegraf,Handbook of Thin-Film Deposition Processes and Techniques(Noyes, Park Ridge, NJ, 1988).