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Dynamics of polymer film formation during spin coating

Published:2014-09-28 Issue:12 Volume:116 Page:123513
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Mouhamad Y.¹,Mokarian-Tabari P.²,Clarke N.¹,Jones R. A. L.¹,Geoghegan M.¹

Affiliation:

1. Department of Physics and Astronomy, The University of Sheffield, Hicks Building, Hounsfield Road, Sheffield S3 7RH, United Kingdom

2. Materials Research Group, Department of Chemistry and the Tyndall National Institute, University College Cork, Cork, Ireland

Funder

Engineering and Physical Sciences Research Council (EPSRC)

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://scitation.aip.org/deliver/fulltext/aip/journal/jap/116/12/1.4896674.pdf?itemId=/content/aip/journal/jap/116/12/10.1063/1.4896674&mimeType=pdf&containerItemId=content/aip/journal/jap

Reference22 articles.

1. Flow of a Viscous Liquid on a Rotating Disk

2. Characteristics of resist films produced by spinning

3. Spin coating: One‐dimensional model

4. Film flow on a rotating disk

5. The dynamics and stability of thin liquid films during spin coating. I. Films with constant rates of evaporation or absorption

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