1. Key Laboratory of Terahertz Solid State Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Chang Ning Road, Shanghai 200050, China
2. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Chinese Academy of Sciences, Beijing 100049, China
3. No. 50 Research Institute of China Electronics Technology Group Corporation, 318 Chang He Road, Shanghai 200331, China
4. CETC Public Facilities Operation Management CO., LTD., 318 Chang He Road, Shanghai 200331, China