Reactions of atomic hydrogen in the deposition of hydrogenated amorphous silicon by glow discharge and reactive sputtering
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.331513
Reference21 articles.
1. Hydrogen elimination during the glow‐discharge deposition ofa‐Si:H alloys
2. Defects in plasma-deposited a-Si: H
3. Mass spectrometry of a silane glow discharge during plasma deposition of a-Si: H films
4. Proton-magnetic-resonance studies of microstructure in plasma-deposited amorphous-silicon—hydrogen films
5. Optical properties and hydrogen concentration in amorphous silicon
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