In situ infrared transmission spectroscopy of nucleation and growth of amorphous hydrogenated silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.117864
Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Interfacial Reactions between Cu x Ni y Alloy Underbump Metallurgy and Sn-Ag-zCu Solders;Journal of Electronic Materials;2007-05-09
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3. In situprobing of surface hydrides on hydrogenated amorphous silicon using attenuated total reflection infrared spectroscopy;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2002-05
4. In situ detection of F2 laser-induced oxidation on hydrogen-terminated Si(111) and Si(110) surfaces by Fourier transform infrared transmission spectroscopy;Thin Solid Films;2001-12
5. Explanation of the limiting thickness observed in low-temperature silicon epitaxy;Applied Physics Letters;2000-11-27
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