Epitaxial silicon layers grown on ion‐implanted silicon nitride layers
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1654956
Reference10 articles.
1. Formation of SiO2Films by Oxygen-Ion Bombardment
2. Isolating surface layers on metallic conductors produced by ion bombardment
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4. LOCALIZED MODES AND DIVACANCY ABSORPTION IN OXYGEN ION IMPLANTED Si
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