Selective lateral dry etching of GaAs in AlGaAs/GaAs heterostructures with CCl2F2/He
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.351639
Reference6 articles.
1. Selective Dry Etching of AlGaAs-GaAs Heterojunction
2. An improved technique for selective etching of GaAs and Ga1−xAlxAs
3. Selective etching of GaAs and Al0.30Ga0.70As with citric acid/hydrogen peroxide solutions
4. Etching of GaAs on AlGaAs in Rie-Mode
5. Selective GaAs/AlxGa1−xAs reactive ion etching using CCl2F2
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3. Dry etching of Al x Ga 1– x N/GaN by CCl 2 F 2 chemistry for device isolation;physica status solidi (c);2005-04-11
4. Type IV collagen and its degradation in paralyzed human muscle: Effect of functional electrical stimulation;Muscle & Nerve;2000-04
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