Short-pulse excitation of microwave plasma for efficient diamond growth
Author:
Affiliation:
1. Advanced Power Electronics Research Center (ADPERC), National Institute of Advanced Industrial Science and Technology (AIST), 1-8-31 Midorigaoka, Ikeda, Osaka 563-8577, Japan
Funder
CSTI, SIP
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4962218
Reference27 articles.
1. Physics and Applications of CVD Diamond
2. Improving purity and size of single-crystal diamond plates produced by high-rate CVD growth and lift-off process using ion implantation
3. Enhanced growth of high quality single crystal diamond by microwave plasma assisted chemical vapor deposition at high gas pressures
4. Growth of large size diamond single crystals by plasma assisted chemical vapour deposition: Recent achievements and remaining challenges
5. High quality MPACVD diamond single crystal growth: high microwave power density regime
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