Author:
Simpson J. Arol,Kuyatt C. E.,Mielczarek S. R.
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Cited by
55 articles.
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2. Electron Interactions with Cl2, CCl2F2, BCl3, and SF6;Fundamental Electron Interactions with Plasma Processing Gases;2004
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4. Electron Interactions With SF6;Journal of Physical and Chemical Reference Data;2000-05
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