Author:
Abbadie A.,Hamaide G.,Mariolle D.,Chaupin M.,Brunier F.,Martinez E.,Mähliß J.
Subject
General Physics and Astronomy
Reference35 articles.
1. Engineering strained silicon on insulator wafers with the Smart CutTM technology
2. I. Cayrefourcq, M. Kennard, F. Metral, C. Mazuré, A. Thean, M. Sadaka, T. White, and B. Y. Nguyen, in Silicon-on-Insulator Technology and Devices XII, ECS Proc. Vol. 2005-03 (2005), edited by G. Celler, S. Cristoloveanu, F. Gamiz, J. G. Fossum, and K. Izumi (The Electrochemical Society, Pennington, NJ, 2005), pp. 191–206.
3. A Chromium-free Defect Etching Solution for Application on SOI
4. A Review of Different and Promising Defect Etching Techniques: from Si to Ge
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献