Infrared absorption of thin films MoSi2/SiNx micro-bridge
Author:
Affiliation:
1. School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China
2. Department of Micro and Nano Systems Technology-IMST, Buskerud and Vestfold University College, Borre 3184, Norway
Funder
National Natural Science Foundation of China (NSFC)
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4943186
Reference9 articles.
1. Infrared Absorption of Three-Layer Films*
2. Application of interferometric enhancement to self-absorbing thin film thermal IR detectors
3. Optical properties and local bonding configurations of hydrogenated amorphous silicon nitride thin films
4. Nanometre optical coatings based on strong interference effects in highly absorbing media
5. Triple-layer Fabry-Perot absorber with near-perfect absorption in visible and near-infrared regime
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