Fabrication of polygonal nanoholes by localized mask-free wet anisotropic etching-Reference-Cited by-同舟云学术

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Fabrication of polygonal nanoholes by localized mask-free wet anisotropic etching

Published:2017-10 Issue:10 Volume:7 Page:105115
ISSN:2158-3226
Container-title:AIP Advances
language:en
Short-container-title:AIP Advances

Author:

Chen Qi¹,Wang Yifan¹,Zhang Hualv²,Deng Tao³,Liu Zewen¹

Affiliation:

1. Institute of Microelectronics, Tsinghua University, Beijing 100084, China

2. College of Big Data and Information Engineering, Guizhou University, Guiyang 550025, China

3. School of Electronic and Information Engineering, Beijing Jiaotong University, Beijing 100044, China

Funder

National Natural Science Foundation of China

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5003458

Reference38 articles.

1. Microfluidics for Processing Surfaces and Miniaturizing Biological Assays

2. The origins and the future of microfluidics

3. On-chip nanohole array based sensing: a review

4. Zero-Mode Waveguides for Single-Molecule Analysis at High Concentrations

5. A Bioanalytical Platform for Simultaneous Detection and Quantification of Biological Toxins

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Exploring the effect of nanoholes on arsenene: a density functional theory study;Journal of Physics: Condensed Matter;2018-04-18

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