Characteristics of thermal SiO2films during nitridation
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.338818
Reference25 articles.
1. Direct Thermal Nitridation of Silicon Dioxide Films in Anhydrous Ammonia Gas
2. Nitrogen reaction at a silicon–silicon dioxide interface
3. Thermal nitridation of silicon dioxide films
4. Study of the kinetics and mechanism of the thermal nitridation of SiO2
5. Retardation of Destructive Breakdown of SiO2 Films Annealed in Ammonia Gas
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