Reaction dynamics of atomic hydrogen with the hydrogenated Si(001) (2×1) surface
Author:
Publisher
AIP Publishing
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.473672
Reference60 articles.
1. Atomic hydrogen-driven halogen extraction from silicon(100): Eley-Rideal surface kinetics
2. Silicon epitaxial growth by plasma enhanced chemical vapor deposition from at 165–350°C
3. Silicon epitaxial growth by plasma enhanced chemical vapor deposition from at 165–350°C
4. Hydrogen desorption from the monohydride phase on Si(100)
5. Facile abstraction of chemisorbed D on Si(100) by atomic H
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