Note: Sample holder with open area for increased deposition rate in plasma immersion ion implantation and deposition-Reference-Cited by-同舟云学术

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Note: Sample holder with open area for increased deposition rate in plasma immersion ion implantation and deposition

Published:2017-09 Issue:9 Volume:88 Page:096106
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Rev. Sci. Instrum.

Author:

Flege S.¹,Hatada R.¹,Derepa A.¹^ORCID,Dietz C.¹,Ensinger W.¹,Baba K.²³^ORCID

Affiliation:

1. Department of Materials Science, Technische Universität Darmstadt, 64287 Darmstadt, Germany

2. Graduate School of Engineering, Nagasaki University, Nagasaki 852-8521, Japan

3. Industrial Technology Center of Nagasaki, Omura, Nagasaki 856-0026, Japan

Publisher

AIP Publishing

Subject

Instrumentation

Reference15 articles.

1. A versatile ultra high vacuum sample stage with six degrees of freedom

2. Structure and wear properties of carbon implanted 304 stainless steel using plasma source ion implantation

3. Plasma source ion implantation: A new, cost-effective, non-line-of-sight technique for ion implantation of materials

4. Handbook of Plasma Immersion Ion Implantation and Deposition, edited by A. Anders (John Wiley & Sons, New York, 2000).

5. Improved ion implant fluence uniformity in hydrogen enhanced glow discharge plasma immersion ion implantation into silicon

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1. Vertically Aligned Boron-Doped Diamond Hollow Nanoneedle Arrays for Enhanced Field Emission;ACS Applied Nano Materials;2022-08-08

2. Influence of Ag/Ca ratio on the osteoblast growth and antibacterial activity of TiN coatings on Ti-6Al-4V by Ag and Ca ion implantation;Surface and Coatings Technology;2020-12

3. The Influence of Preparation Conditions on the Structural Properties and Hardness of Diamond-Like Carbon Films, Prepared by Plasma Source Ion Implantation;Coatings;2020-04-06

4. Metal Cylindrical Sieve (MCS) for plasma confinement and low sputtering nitrogen plasma immersion ion implantation;Applied Surface Science;2020-04

5. Tightly adhering diamond-like carbon films on copper substrates by oxygen pre-implantation;Surface and Coatings Technology;2018-02

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