Anomalous diffusion and gettering of transition metals in silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.97100
Reference5 articles.
1. Mechanical Damage Gettering Effect in Si
2. Minority carrier lifetime improvement in silicon through laser damage gettering
3. Laser Damage Gettering and Its Application to Lifetime Improvement in Silicon
4. Elimination of Process‐Induced Stacking Faults by Preoxidation Gettering of Si Wafers: II . Process
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