Electrical transport and optical properties of zirconium nitride/aluminum nitride multilayers
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.347320
Reference12 articles.
1. Elastic constants of metal‐insulator superlattices
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5. Reflectivity of ScNx thin films: Comparison with TiNx, TiNxCy and ZrNx coatings and application to the photothermal conversion of solar energy
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1. Modeling of very thin aluminum nitride film mechanical properties from nanoindentation measurements;Thin Solid Films;2015-11
2. Low temperature plasma enhanced atomic layer deposition of conducting zirconium nitride films using tetrakis (dimethylamido) zirconium and forming gas (5% H2 + 95% N2) plasma;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2015-05
3. Preparation, characterization and properties of N-rich Zr–N thin film with Th3P4 structure;Applied Surface Science;2009-04
4. Temperature dependence of inductively coupled plasma assisted growth of TiN thin films;Surface and Coatings Technology;1999-11
5. Chapter 3 Growth of Group III–A Nitrides by Reactive Sputtering;Semiconductors and Semimetals;1997
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