Theoretical and experimental study of the dynamic response of absorber-based, micro-scale, oscillatory probes for contact sensing applications-Reference-Cited by-同舟云学术

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Theoretical and experimental study of the dynamic response of absorber-based, micro-scale, oscillatory probes for contact sensing applications

Published:2016-06 Issue:6 Volume:87 Page:065005
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Kafashi Sajad¹,Strayhorn Ralph¹,Eldredge Jeff D.²^ORCID,Kelly Scott D.³,Woody Shane C.⁴,Smith Stuart T.¹^ORCID

Affiliation:

1. Center for Precision Metrology at UNC Charlotte, Charlotte, North Carolina 28223, USA

2. Mechanical and Aerospace Engineering, University of California, Los Angeles, Los Angeles, California 90095, USA

3. Mechanical Engineering and Engineering Science, UNC Charlotte, Charlotte, North Carolina 28223, USA

4. InsituTec Inc., 7140 Weddington Road Suite 144, Concord, North Carolina 28027, USA

Funder

Division of Civil, Mechanical and Manufacturing Innovation (CMMI)

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/am-pdf/10.1063/1.4954164

Reference25 articles.

1. Method for the calibration of atomic force microscope cantilevers

2. Calibration of rectangular atomic force microscope cantilevers

3. Piezoelectric tip‐sample distance control for near field optical microscopes

4. Crystals for quartz resonators

5. A three-fingered, touch-sensitive, metrological micro-robotic assembly tool

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