Etching characteristics of thin films of tungsten, amorphous silicon carbide, and SAL‐603 resist submitted to a surface‐wave driven SF6magnetoplasma near electron cyclotron resonance conditions-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Etching characteristics of thin films of tungsten, amorphous silicon carbide, and SAL‐603 resist submitted to a surface‐wave driven SF6magnetoplasma near electron cyclotron resonance conditions

Published:1995-04-15 Issue:8 Volume:77 Page:4030-4038
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Bounasri F.,Moisan M.,St‐Onge L.,Margot J.,Chaker M.,Pelletier J.,El Khakani M. A.,Gat E.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.359484

Reference37 articles.

1. Characteristics of electron cyclotron resonance plasma sources

2. Computer-Aided Design of a New High-Performance Mass Spectrometer

3. Reactive ion stream etching utilizing electron cyclotron resonance plasma

4. Application of reactive-ion-beam etching to recessed-gate GaAs metal–semiconductor field-effect transistors

5. Electron cyclotron resonance microwave discharges for etching and thin‐film deposition

Cited by 21 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Travelling-wave-sustained discharges;Physics Reports;2007-05

2. Surface Waves at a Dusty Plasma-Metal Interface;Physica Scripta;2004-01-01

3. Surface Wave Control under Plasma–Metal Processing;Physica Scripta;2004-01-01

4. Stability of surface waves at magnetized plasma– metal interface;Contributions to Plasma Physics;2003-12

5. Gas discharge plasmas and their applications;Spectrochimica Acta Part B: Atomic Spectroscopy;2002-04

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP