Impedance characteristics of an rf parallel plate discharge and the validity of a simple circuit model
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.339019
Reference24 articles.
1. Plasma Sheath Formation by Radio-Frequency Fields
2. Radio frequency characteristics of the plasma sheath
3. Application of RF Discharges to Sputtering
4. Electrical Properties of RF Sputtering Systems
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2. Experimental studies on waveform distortion of pulse-modulated RF atmospheric-pressure discharge;Japanese Journal of Applied Physics;2019-05-03
3. Electrical Characteristics of Capacitive Coupled Radio Frequency Discharges in Argon and Hydrogen;Plasma Physics Reports;2019-04
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