Microfabrication of millimeter wave vacuum electron devices by two-step deep-etch x-ray lithography
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2178770
Reference16 articles.
1. Terahertz imaging system based on a backward-wave oscillator
2. Applications and Outlook for Electronic Terahertz Technology
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4. Design and fabrication of a 94 GHz klystron
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