Conformal oxides on Si surfaces
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.119947
Reference27 articles.
1. Study of tunneling current oscillation dependence on SiO2 thickness and Si roughness at the Si/SiO2 interface
2. Roughness Evaluation of Thermally Oxidized Si(111) Surfaces by Scanning Force Microscopy
3. Structure of the stepped Si/SiO2interface after thermal oxidation: Investigations with scanning tunneling microscopy and spot‐profile analysis of low‐energy electron diffraction
4. Regular step arrays at the SiO2/Si(111) interface
5. Observation of atomic step morphology on silicon oxide surfaces
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