Monolithic ultrasonic integrated circuits based on micromachined semi-ellipsoidal piezoelectric domes
Author:
Affiliation:
1. FUJIFILM Dimatix, Inc., 2250 Martin Ave., Santa Clara, California 95050, USA
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4831988
Reference20 articles.
1. Ultra-low loss photonic integrated circuit with membrane-type photonic crystal waveguides
2. Microfabrication Techniques for Integrated Sensors and Microsystems
3. Microfluidic Large-Scale Integration
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