1. Helmholtz-Zentrum Dresden-Rossendorf, Institute of Ion Beam Physics and Materials Research, Bautzner Landstraße 400, 01328 Dresden, Germany
2. Material Systems for Nanoelectronics, Chemnitz University of Technology, 09107 Chemnitz, Germany
3. CiS Forschungsinstitut für Mikrosensorik GmbH, Konrad-Zuse-Str. 14, 99099 Erfurt, Germany
4. State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, 610054 Chengdu, China
5. Institute for Experimental Physics, TU Bergakademie Freiberg, 09599 Freiberg, Germany
6. Institute for Integrative Nanosciences, IFW Dresden, 01069 Dresden, Germany