Epitaxial relationship in the AlN/Si(001) heterosystem
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.126244
Reference9 articles.
1. Molecular beam epitaxy (MBE) growth and structural properties of GaN and AlN on 3C-SiC(001) substrates
2. Characterization of Group III-nitride semiconductors by high-resolution electron microscopy
3. Epitaxial growth of cubic AlN films on (100) and (111) silicon by pulsed laser ablation
4. Aluminum nitride films on different orientations of sapphire and silicon
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4. Textured hexagonal and cubic phases of AlN films deposited on Si (100) by DC magnetron sputtering and high power impulse magnetron sputtering;Thin Solid Films;2018-06
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