1. Physikalisches Institut, Karlsruhe Institute of Technology, D-76128 Karlsruhe, Germany
2. The 10th Institute of Chinese Electronic Technology Corporation, Chengdu 610036, China
3. Experimentalphysik, Universität des Saarlandes, D-66123 Saarbrücken, Germany
4. Laboratory of Superconducting Metamaterials, National University of Science and Technology “MISIS,” Moscow 119049, Russia
5. Institut für Physik, Johannes Gutenberg-Universität Mainz, D-55099 Mainz, Germany