Super-resolution in laser annealing and ablation
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1688995
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4. Submicron-resolution ablation with a KrF excimer laser beam patterned with a projection lens
5. Effective deep ultraviolet photoetching of polymethyl methacrylate by an excimer laser
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