Tuning the electrical resistivity of pulsed laser deposited TiSiOx thin films from highly insulating to conductive behaviors
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1688999
Reference17 articles.
1. Refractory silicides for integrated circuits
2. Effect of TiOx on the formation of titanium silicide layer
3. High-κ gate dielectrics: Current status and materials properties considerations
4. Spectroscopic study of chemical phase separation in zirconium silicate alloys
5. Experimental studies of inhomogeneous coatings for optical applications
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