Fast atom beam-activated n-Si/n-GaAs wafer bonding with high interfacial transparency and electrical conductivity
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4807905
Reference33 articles.
1. Direct bonding of GaAs films on silicon circuits by epitaxial liftoff
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