Fabrication of ferroelectric SrBi2Ta2O9 capacitor films using plasma-assisted metalorganic chemical vapor deposition and their electrical properties
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1353564
Reference20 articles.
1. Fatigue-free ferroelectric capacitors with platinum electrodes
2. Characteristics of Bismuth LayeredSrBi2Ta2O9Thin-Film Capacitors and Comparison withPb(Zr,Ti)O3
3. Preparation of SrBi2Ta2O9 ferroelectric thin film by rf magnetron sputtering
4. Analysis of the Dependence of Ferroelectric Properties of Strontium Bismuth Tantalate (SBT) Thin Films on the Composition and Process Temperature
5. Evolution of Ferroelectric Structure in SrBi2Ta2O9Thin Films Prepared Using Triple Alkoxides on Pt-Passivated Si
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Ferroelectric Transistors for Memory and Neuromorphic Device Applications;Advanced Materials;2023-04-04
2. Phase control of iridium and iridium oxide thin films in atomic layer deposition;Journal of Applied Physics;2008-01-15
3. Barium acylpyrazolonate derivatives stabilized by O- and N-donor ligands: synthesis, spectral and structural characterization;Inorganica Chimica Acta;2005-03
4. Formation of PZT Thin Films on 6-Inch Wafers by Liquid Delivery Metalorganic Chemical Vapor Deposition;Key Engineering Materials;2004-05
5. Low Voltage Switching Characteristics of 60 nm Thick SrBi[sub 2]Ta[sub 2]O[sub 9] Thin Films Deposited by Plasma-Enhanced ALD;Electrochemical and Solid-State Letters;2004
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3