Note: High temperature pressure sensor for petroleum well based on silicon over insulator
Author:
Affiliation:
1. State Key Laboratory for Mechanical Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an, Shaanxi, China
Funder
National Natural Science Foundation of China (NSFC)
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4937355
Reference5 articles.
1. Fabrication of curved sub-micron Si structures by a combination of anisotropic etching using surfactant-added TMAH solution and FIB direct-drawn mask
2. High temperature and frequency pressure sensor based on silicon-on-insulator layers
3. An ultra-high pressure sensor based on SOI piezoresistive material
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