Thermal oxidation of silicides
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.334212
Reference20 articles.
1. Oxidation mechanisms in WSi2thin films
2. Kinetics of the thermal oxidation of WSi2
3. Oxidation of sputtered molybdenum silicide thin films
4. 1 µm MOSFET VLSI technology: Part VII—Metal silicide interconnection technology—A future perspective
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