Determination of the multiple local properties of thin layer with high lateral resolution by scanning acoustic microscopy
Author:
Funder
NNSFC
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4894261
Reference15 articles.
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5. Determination of elastic moduli, density, attenuation, and thickness of a layer using ultrasonic spectroscopy at two angles
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